Abstract: In this paper, the use of Silicon-on-Nothing (SON) pMUTs for relative humidity sensing is investigated for the first time. The work presented here demonstrates the sensitivity of these pMUTs ...
The HDC302x is an integrated, capacitive based relative humidity (RH) and temperature sensor . The device provides high accuracy measurements over a wide supply range (1.62V – 5.5V) and ultra low ...
Abstract: Non-dispersive infrared (NDIR) gas sensors can be adversely affected by changes in temperature and relative humidity if not properly designed in hardware and software. High relative humidity ...
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